Description
🔹 Product Overview
The ENTEGRIS 6500-T3-F02-D06-L-P2-U1 is a Model 6500 NT Integrated Flow Controller designed for precision liquid-flow monitoring and control in high-purity chemical delivery systems. The compact controller combines flow sensing, control functions and an integral pressure transducer within one assembly.
The Model 6500 series is widely associated with semiconductor, chemical-processing and other precision liquid-dispense applications where accurate and repeatable flow control is important. PTFE wetted surfaces and nonmetallic construction support applications involving high-purity and corrosion-sensitive process chemicals.
📋 Product Datasheet
| Parameter | Specification |
|---|---|
| Brand | Entegris |
| Model | 6500-T3-F02-D06-L-P2-U1 |
| Series | NT Model 6500 |
| Product Name | Integrated Flow Controller |
| Product Type | Precision Liquid Flow Control System |
| Flow Range Code | T3 |
| Nominal Flow Range | 0–500 mL/min |
| Process Connection | F02 |
| Port Size | 1/4 in. Flaretek tube fitting |
| Electrical Connection | D06 |
| Controller Type | L |
| Setpoint Input | 0–10 VDC batch configuration |
| Sensor Interface | P2 |
| Sensor Interface Material | PFA |
| Primary / Secondary Seal | U1 configuration |
| Wetted Surface Material | PTFE-based high-purity wetted surfaces |
| Pressure Monitoring | Integral pressure transducer |
| Flow Accuracy | Up to ±1% of full scale under specified operating conditions |
| Typical Response | Fast response, typically within 3 seconds depending on operating conditions |
| Process Temperature | Approximately 10–65 °C |
| Operating Pressure Range | Approximately 10–60 PSIG |
| Maximum Pressure | Approximately 100 PSIG |
| Product Condition | Used |
| Country of Origin | Verify from product nameplate |
| Dimensions | Configuration-dependent; approximately based on F02 Model 6500 mechanical layout |
| Weight | Verify actual unit; used-market references list approximately 4.9–5 kg for similar assemblies |
The T3 code corresponds to a nominal 0–500 mL/min flow range, while F02 corresponds to a 1/4-inch Flaretek process connection. The Model 6500 family documentation also identifies L as a 0–10 VDC batch controller type and P2 as a PFA sensor interface in the applicable ordering configuration.
⚠️ Some configuration details can vary between production generations. Always verify the complete nameplate and installed electrical configuration before installation.
⚙️ Key Features
🔹 Integrated flow measurement and control
🔹 T3 configuration for 0–500 mL/min nominal flow range
🔹 1/4-inch Flaretek process connections
🔹 Compact installation footprint
🔹 Integral pressure monitoring
🔹 High-purity liquid-handling construction
🔹 PTFE wetted surfaces
🔹 Nonmetallic wetted components for corrosion resistance
🔹 Suitable for precision dispense applications
🔹 Fast response to changing flow requirements
🔹 Designed for integration into automated chemical delivery systems
The Model 6500 platform is designed to provide accurate flow control while also supplying additional process information through its integral pressure-transducer function.
🏭 Typical Applications
The ENTEGRIS 6500 series is suitable for precision liquid-flow applications where chemical compatibility and repeatable dispensing are required.
Typical applications include:
🔹 Semiconductor manufacturing equipment
🔹 Wet-process chemical delivery
🔹 Chemical mechanical processing systems
🔹 High-purity chemical dispense
🔹 Automated liquid blending
🔹 Precision manufacturing equipment
🔹 Process chemical distribution systems
🔹 Laboratory and industrial fluid-control systems
🔹 Legacy semiconductor-tool maintenance
🔹 Chemical process automation
The actual suitability of the 6500-T3-F02-D06-L-P2-U1 depends on the process chemical, pressure, temperature and material-compatibility requirements.
🔧 Installation Notes
Before installing the controller, confirm that the process chemistry is compatible with the wetted materials and that the flow range matches the application.
Recommended installation procedure:
- Isolate the process fluid and electrical supply.
- Verify the complete Entegris model number.
- Confirm the required flow direction.
- Inspect the inlet and outlet connections.
- Verify compatibility of the 1/4-inch Flaretek fittings.
- Mount the controller securely.
- Connect the electrical cable according to the installed configuration.
- Confirm the control-system setpoint signal.
- Purge the fluid path according to the applicable process procedure.
- Check all fittings for leakage.
- Apply power and allow the controller to initialize.
- Verify pressure and flow readings.
- Perform a controlled flow-response test.
- Confirm stable operation before returning the process system to production.
Avoid applying excessive mechanical force to the fluid fittings or electrical connector.
🛠️ Maintenance Recommendations
Regular maintenance is especially important when the controller is used with process chemicals.
Fluid Path
🔹 Inspect fittings for leakage.
🔹 Check tubing for chemical degradation.
🔹 Verify that the flow path remains free from contamination.
🔹 Follow the correct flushing procedure before storage.
🔹 Avoid incompatible cleaning chemicals.
Electrical System
🔹 Inspect the electrical cable and connector.
🔹 Check the control signal.
🔹 Verify stable power and grounding.
🔹 Monitor abnormal communication or control behavior.
Performance
🔹 Compare actual flow with the required process setpoint.
🔹 Monitor pressure readings.
🔹 Check response time during setpoint changes.
🔹 Perform calibration or verification according to plant maintenance requirements.
For critical semiconductor or high-purity chemical applications, maintenance intervals should be based on chemical exposure and process usage rather than calendar time alone.
🔍 Inspection & Testing
Visual Inspection
🔹 Confirm the complete part number.
🔹 Inspect the controller body for cracks or impact damage.
🔹 Check Flaretek fittings.
🔹 Inspect electrical connectors and cable condition.
🔹 Look for chemical residue or leakage.
🔹 Check mounting points.
Electrical Test
🔹 Verify the correct electrical configuration.
🔹 Confirm controller startup.
🔹 Check the setpoint input.
🔹 Verify output response.
Flow Test
🔹 Connect a compatible test-fluid system.
🔹 Verify flow response across the operating range.
🔹 Compare actual flow with the commanded setpoint.
🔹 Monitor integral pressure information.
🔹 Check for leakage during operation.
🔹 Confirm stable control response.
A complete functional test should be performed using compatible process connections, control electronics and a suitable test-fluid system.
❓ Frequently Asked Questions
❓ What flow range does the T3 configuration represent?
The T3 flow-range code corresponds to 0–500 mL/min for the Model 6500 ordering system.
❓ What does F02 mean?
F02 identifies a 1/4-inch Flaretek tube-fitting connection.
❓ What is an integrated flow controller?
It combines flow sensing and flow-control functions in one unit, reducing the number of separate components required in a liquid-delivery system.
❓ Does this controller measure pressure?
Yes. The Model 6500 platform includes an integral pressure transducer that provides additional process information.
❓ Is this suitable for semiconductor chemical systems?
The Model 6500 series is designed for high-purity liquid-control applications and is commonly suited to semiconductor chemical-delivery environments. Chemical compatibility must still be checked for the specific process fluid.
❓ Can another Model 6500 directly replace this unit?
Not necessarily. The replacement must match the flow range, fitting size, electrical configuration, controller type, sensor interface and seal-material requirements.
❓ What should be checked before purchasing a replacement?
Check:
🔹 Complete part number
🔹 Flow range
🔹 Process fitting size
🔹 Electrical connector
🔹 Setpoint/control type
🔹 Sensor interface material
🔹 Seal configuration
🔹 Process chemical compatibility
🔄 Recommended Related ENTEGRIS Models
🔹 ENTEGRIS 6500-T0 — 0–50 mL/min Integrated Flow Controller
🔹 ENTEGRIS 6500-T1 — 0–125 mL/min Integrated Flow Controller
🔹 ENTEGRIS 6500-T2 — 0–250 mL/min Integrated Flow Controller
🔹 ENTEGRIS 6500-T3 — 0–500 mL/min Integrated Flow Controller
🔹 ENTEGRIS 6500-T4 — 0–1250 mL/min Integrated Flow Controller
🔹 ENTEGRIS 6500-T5 — 0–2.5 L/min Integrated Flow Controller
🔹 ENTEGRIS 6500-T6 — 0–5 L/min Integrated Flow Controller
🔹 ENTEGRIS 6500-T7 — 0–10 L/min Integrated Flow Controller
🔹 ENTEGRIS 6500-T8 — 0–20 L/min Integrated Flow Controller
🔹 ENTEGRIS 6500-T9 — 0–40 L/min Integrated Flow Controller
These are related Model 6500 configurations. They are not automatically interchangeable because process connections, electrical interfaces, seals and control configurations can differ.
📦 Product Identification
For replacement or purchasing inquiries, provide:
🔹 Brand: Entegris
🔹 Model: 6500-T3-F02-D06-L-P2-U1
🔹 Required flow range
🔹 Process chemical
🔹 Process pressure
🔹 Process temperature
🔹 Fitting configuration
🔹 Electrical connection details
🔹 Photos of the product label
🔹 Photos of the electrical connector
The complete configuration should be matched before installing the controller into a high-purity chemical-delivery system.
🏷️ Suggested Short Title
ENTEGRIS 6500-T3-F02-D06-L-P2-U1 | NT Integrated Flow Controller
