Description
Product Overview
The KLA Tencor 820-22196-002 is a printed circuit board used as an equipment-specific spare part for KLA-Tencor semiconductor manufacturing and inspection systems.
The exact part number 820-22196-002 is listed in semiconductor equipment spare-parts inventories as a KLA Tencor PCB. Because the available public references identify the board mainly by its part number and product category, the exact electrical function, operating voltage, interface configuration, and host equipment platform should be verified from the original installed board or KLA equipment documentation before replacement.
This makes the 820-22196-002 particularly suitable for maintenance applications where an exact part-number replacement is required for an existing KLA-Tencor system.

Key Features
- KLA Tencor equipment-specific PCB
- Part Number: 820-22196-002
- Designed for semiconductor equipment applications
- Suitable for maintenance and replacement purposes
- Intended for integration within compatible KLA-Tencor systems
- Exact hardware function should be verified before installation
- Part-number matching is recommended for replacement applications
- Board revision and connector configuration should be compared with the installed unit
Technical Datasheet
| Parameter | Specification |
|---|---|
| Manufacturer | KLA Tencor |
| Part Number | 820-22196-002 |
| Product Type | Printed Circuit Board / PCB |
| Application | Semiconductor manufacturing and inspection equipment |
| System Compatibility | KLA-Tencor equipment; verify exact platform |
| Board Function | Equipment-specific; verify from original system |
| Supply Voltage | Verify from equipment documentation |
| Interface Type | Verify from actual board |
| Connector Configuration | Verify from actual board |
| Board Revision | Verify from physical label |
| Dimensions | Verify from actual unit |
| Operating Environment | Verify from equipment documentation |
Functional Description
The 820-22196-002 should be treated as an equipment-specific PCB rather than a general-purpose industrial control card.
Within a semiconductor equipment system, a PCB of this type may form part of a larger control, interface, monitoring, signal-processing, or equipment-support architecture. However, the exact role of this particular part number cannot be confirmed reliably from the publicly available references.
For this reason, the following specifications should be verified before installation:
- Equipment model
- Original PCB assembly number
- Board revision
- Connector locations
- Power requirements
- Signal interfaces
- Associated cables or backplane connections
- System firmware or configuration requirements
Typical Applications
The KLA Tencor 820-22196-002 is relevant to maintenance and spare-parts support for semiconductor equipment.
Typical applications include:
- Semiconductor inspection equipment maintenance
- Wafer processing equipment support
- Legacy KLA-Tencor system repair
- PCB replacement
- Production equipment refurbishment
- Preventive maintenance
- Equipment spare-parts inventory
- Restoration of older semiconductor manufacturing systems
For older equipment, maintaining an exact replacement PCB can help avoid major system modifications that could otherwise require changes to wiring, software, interfaces, or equipment configuration.
Installation & Configuration Guide
Before replacing the installed board, perform the following checks.
1. Verify the Exact Part Number
Confirm the complete identification:
820-22196-002
Do not rely only on the first portion of the part number.
Related KLA-Tencor PCB part numbers such as 820-22195-002 and 820-22197-001 are listed separately in spare-parts inventories and should not automatically be considered interchangeable.
2. Compare the Physical Hardware
Compare the replacement board with the original unit:
- PCB dimensions
- Connector positions
- Connector keying
- Component layout
- Mounting holes
- Board labels
- Revision markings
- Jumper or switch positions
3. Follow ESD Procedures
Use appropriate electrostatic discharge protection when handling the PCB.
Recommended precautions include:
- Grounded ESD wrist strap
- ESD-safe work surface
- Anti-static packaging
- Handling the board by its edges
Avoid touching connector contacts and exposed electronic components unnecessarily.
4. Install the Board
Power down and isolate the equipment according to the applicable KLA-Tencor service procedure.
Remove the original board carefully and document all cable and connector locations. Install the replacement PCB in the same position and orientation.
Confirm that:
- All connectors are fully seated
- No pins are bent or damaged
- Retaining hardware is secure
- Cable routing matches the original installation
5. Perform System Verification
After installation, qualified maintenance personnel should check:
- Equipment power-up
- PCB recognition
- Communication with associated hardware
- Status and diagnostic indications
- Alarm and interlock conditions
- Normal subsystem operation
- Equipment functional testing
A controlled system-level test is recommended before returning production equipment to normal operation.
Maintenance & Inspection
Before installing a stored or previously used board, inspect:
- Part-number label
- Revision markings
- PCB surface
- Connector contacts
- Signs of corrosion
- Oxidation
- Burn marks
- Component discoloration
- Mechanical damage
- Contamination or residue
For long-term storage, keep the board in suitable ESD-safe packaging in a clean and dry environment.
Compatibility Notes
The complete part number 820-22196-002 should be treated as the primary replacement identifier.
Do not substitute a similar-looking KLA-Tencor PCB based only on:
- Similar numbering
- Similar PCB dimensions
- Similar connector layout
- Similar equipment family
Compatibility should be confirmed using:
Manufacturer + Complete P/N + Board Revision + Existing PCB + Equipment Model
This is especially important for legacy semiconductor equipment, where minor PCB revisions can have different electrical or interface configurations.
Product Identification
Manufacturer: KLA Tencor
Part Number: 820-22196-002
Product Type: Semiconductor Equipment PCB
Application: KLA-Tencor Semiconductor Equipment
Function: Equipment-specific; verify against the installed system
Recommended eBay SEO Title
KLA Tencor 820-22196-002 Semiconductor Equipment PCB Circuit Board
Short Chinese Title
KLA Tencor 820-22196-002 | 半导体设备PCB电路板
