Description
Product Overview
LAM 853-064940-033 is a Lam Research part number used in semiconductor manufacturing equipment and is listed in multiple industrial semiconductor-equipment spare-parts inventories. The exact public technical description for this P/N is limited, so it is best treated as an equipment-specific replacement part rather than assigning an unverified function or module type.
For semiconductor fabs and equipment service organizations, parts such as this are normally sourced by exact part number, physical configuration, revision, and equipment compatibility. Before installation, the part number and revision should be compared against the equipment BOM or service documentation.
Key Features
- Manufacturer: Lam Research
- Part Number: 853-064940-033
- Equipment category: Semiconductor manufacturing equipment spare part
- OEM: Lam Research
- Designed for equipment-specific replacement and maintenance
- Suitable for inventory planning and maintenance support
- Exact function and electrical specifications should be verified against the applicable equipment documentation
- Useful as a replacement candidate when an identical P/N is required
Technical Datasheet
| Parameter | Details |
|---|---|
| Manufacturer | Lam Research |
| Part Number | 853-064940-033 |
| Product Type | Equipment-specific spare part |
| Application | Semiconductor manufacturing equipment |
| Function | Verify according to equipment BOM/service documentation |
| Electrical Rating | Not publicly verified |
| Interface | Not publicly verified |
| Dimensions | Not publicly verified |
| Compatible Equipment | Verify by equipment model and revision |
| Revision | Verify from physical nameplate |
| Condition | Refer to the actual listing condition |
The part number has been independently indexed in semiconductor-equipment spare-parts inventories, including listings specifically identifying it as a Lam Research P/N.
Identification and Compatibility
For this type of Lam Research spare part, the safest identification method is to match all available information:
- Confirm the complete P/N: 853-064940-033.
- Check the label, barcode, revision marking, and assembly number on the physical part.
- Compare the component with the customer’s existing part.
- Verify the applicable Lam Research equipment model.
- Check the equipment BOM or maintenance documentation before installation.
- Do not substitute a visually similar Lam part unless the replacement relationship has been confirmed.
This is particularly important because Lam Research uses many closely related assembly and board part numbers. Public inventory records, for example, separately list other 853-064940 series numbers such as 853-064940-012, 853-064940-018, 853-064940-040 and 853-064940-206. These should not automatically be considered interchangeable.
Installation & Configuration
Installation should be performed by personnel familiar with the applicable Lam Research semiconductor processing equipment.
Before installation:
- Power down and isolate the equipment according to the equipment service procedure.
- Follow the required ESD precautions.
- Record the original part number and revision.
- Inspect connectors, mounting points, cables, and fasteners for damage.
- Compare the replacement part with the removed component.
After installation, perform the equipment manufacturer’s recommended initialization, diagnostics, calibration, or functional checks. Do not apply power to an unidentified replacement part simply to determine its function.
Maintenance & Inspection
Because the exact construction of 853-064940-033 is not sufficiently documented in public OEM material, maintenance should follow the procedure specified for the host equipment.
Recommended checks include:
- Inspect the housing and PCB/assembly surfaces for contamination or physical damage.
- Check connectors for bent, oxidized, or contaminated contacts.
- Verify all labels and revision markings remain readable.
- Keep the part in suitable ESD-controlled packaging during storage.
- Avoid unnecessary handling of exposed electrical contacts.
- Record installation history and equipment association for future troubleshooting.
For spare-parts inventory, storing the complete P/N and revision together with the equipment model is strongly recommended. This reduces the chance of mixing visually similar Lam Research assemblies.
Typical Application
The part is intended for use as a replacement/spare component within Lam Research semiconductor manufacturing equipment. Exact process application should be determined from the host tool documentation rather than inferred solely from the P/N.
It can be useful for:
- Semiconductor fab maintenance
- Preventive maintenance inventory
- Equipment restoration
- Tool downtime reduction
- Obsolete-equipment spare-parts support
- Service-provider replacement stock
Purchasing & Verification Notes
When purchasing 853-064940-033, request clear photographs of the nameplate and any revision markings when the physical configuration is important.
For critical semiconductor equipment, verify:
P/N → Revision → Assembly configuration → Equipment model → BOM compatibility
This verification chain is more reliable than matching the component based only on appearance.
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