Description
The LAM Research 605-109114-004 Rev.A is a controller board used in semiconductor manufacturing equipment control systems. This board is identified as a GE V7668A-132L00W04 based embedded computer board and is designed for equipment control, communication processing, and system coordination functions in Lam Research wafer processing platforms.
The 605-109114-004 controller board provides industrial computing capability for semiconductor fabrication equipment, supporting real-time control, data communication, and machine operation management. It is commonly maintained as a spare or replacement component for Lam Research etch and related process tools.

605-109114-004
⚙️ Product Features
• Designed for Lam Research semiconductor processing equipment.
• Based on GE V7668A embedded controller architecture.
• Provides equipment control processing and system communication functions.
• Supports high-speed industrial data exchange and machine coordination.
• Used in wafer fabrication equipment requiring reliable controller replacement parts.
• Modular PCB design for maintenance and system upgrades.
• Suitable for semiconductor manufacturing environments including etch and process control applications.
📋 Product Datasheet
| Parameter | Specification |
|---|---|
| Brand | LAM Research |
| Model | 605-109114-004 Rev.A |
| Series | V7668A Embedded Controller System |
| Product Name | Controller Board / Single Board Computer |
| Place of Manufacture | United States |
| Product Status | Used / Tested Replacement Spare |
| Dimensions | Approx. 233 × 160 × 25 mm |
| Weight | Approx. 0.8–1.2 kg |
| Country of Origin | USA |
| Power Requirements | 5VDC / 12VDC system power supply |
| Discontinued | Legacy semiconductor equipment controller, maintained through spare parts market |
❓ Frequently Asked Questions
🔹 Q: What is the main function of the LAM Research 605-109114-004?
A: It is a controller board that provides embedded computing, equipment communication, and process control functions inside Lam Research semiconductor manufacturing tools.
🔹 Q: Is 605-109114-004 a PLC module?
A: No. It is an industrial computer/controller board designed for semiconductor process equipment rather than a standard PLC automation module.
🔹 Q: What is the relationship between 605-109114-004 and V7668A-132L00W04?
A: The 605-109114-004 part number is associated with the GE V7668A-132L00W04 controller board configuration used in Lam Research systems.
🔹 Q: What equipment uses this controller board?
A: It is used in Lam Research semiconductor fabrication equipment for process control and system management applications.
🔹 Q: What should be checked before installation?
A: Verify part number, revision level, firmware compatibility, connectors, memory configuration, and equipment model before installation.
🔹 Q: Can Rev.A replace other 605-109114 versions?
A: Replacement depends on hardware revision, system configuration, and software compatibility.
🔹 Q: Why are these boards required as spare parts?
A: Semiconductor production tools often require long-term maintenance support, and replacement controller boards help reduce equipment downtime.
⭐ Recommended LAM Research Related Models
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