Description
Product Overview
The LAM Research 853-049542-173 is a specialized semiconductor equipment PCB identified in multiple equipment inventories as a NODE PCB, 24 CH TEMP CTLR ASSY. The board is used as part of a temperature-control system within Lam Research process equipment.
The part number is also associated with 810-028295-173, which appears alongside 853-049542-173 in several equipment listings.
This is a dedicated Lam Research equipment board, not a general-purpose temperature controller. For replacement purposes, the complete part number, revision, connector arrangement, and tool configuration should be matched carefully.
Technical Specifications
| Parameter | Specification |
|---|---|
| Manufacturer | LAM Research |
| Part Number | 853-049542-173 |
| Associated P/N | 810-028295-173 |
| Board Type | Node PCB / Temperature Controller Assembly |
| Temperature Control Channels | 24 channels |
| System Function | Temperature monitoring and control |
| Application | Semiconductor manufacturing equipment |
| Equipment Type | Lam Research process equipment |
| Condition of Referenced Listing | Used |
The 24-channel temperature-controller identification is supported by multiple secondary-market records.
Key Features
- Lam Research OEM equipment PCB
- Part number 853-049542-173
- 24-channel temperature-control configuration
- Node-board architecture
- Designed for integration into semiconductor processing equipment
- Associated with 810-028295-173
- Suitable for equipment maintenance and replacement
- Compact board-level assembly for dedicated process-tool applications
Typical Applications
The 853-049542-173 is intended for temperature-control functions within semiconductor processing equipment.
Typical applications include:
- Semiconductor wafer-processing equipment
- Process-chamber temperature control
- Heater-zone monitoring
- Temperature sensor interface systems
- Etch and deposition equipment
- Lam Research equipment maintenance
- Legacy semiconductor-tool refurbishment
- Critical spare-parts inventory
Some industry listings specifically describe the board as a 24-channel temperature control node board used in semiconductor wafer-processing equipment.
Installation and Configuration
Before replacing an existing board, verify the original equipment configuration.
- Confirm the complete part number: 853-049542-173.
- Check for any PCB revision marking.
- Compare the board layout and connector arrangement.
- Verify the associated 810-028295-173 identification where applicable.
- Record the position of all sensor and control cables before removal.
- Shut down the equipment and isolate electrical power.
- Use appropriate ESD protection.
- Install the board into the designated node/backplane position.
- Reconnect the temperature-sensor and control harnesses.
- Restore system power.
- Check node communication and temperature-channel status.
- Run the equipment’s normal diagnostics before returning the tool to production.
Do not assume that another Lam Research temperature-control board is interchangeable solely because it has the same number of channels.
Inspection and Testing
For a used or surplus 853-049542-173, recommended inspection includes:
Visual Inspection
- Verify the 853-049542-173 marking.
- Check PCB revision and assembly markings.
- Inspect connectors and pins.
- Check the PCB for cracks or impact damage.
- Look for corrosion or contamination.
- Inspect components for overheating or discoloration.
- Check mounting hardware and board edges.
Functional Testing
Where a compatible Lam Research test environment is available:
- Power-up verification
- Node recognition
- Temperature-channel communication
- Sensor input verification
- Temperature-control response
- Alarm/status verification
- Heater-control verification where applicable
- Extended operating test
A basic visual inspection does not establish full functionality. Testing with compatible equipment is recommended for critical replacement applications.
Temperature-Control Considerations
A multi-channel temperature controller is normally part of a larger closed-loop process-control system. The board itself may work together with temperature sensors, heater assemblies, backplane hardware, and system software.
When troubleshooting a temperature-control problem, check the complete signal path rather than replacing the PCB immediately:
- Sensor and thermocouple wiring
- Connector seating
- Backplane connections
- Heater circuits
- Power rails
- Node communication
- Temperature-channel configuration
- Control parameters
This approach can help distinguish a defective controller board from a sensor, heater, wiring, or backplane problem.
Maintenance and Storage
For spare inventory, protect the board against ESD, moisture, dust, and mechanical impact.
Recommended storage:
- Use an ESD-safe bag or conductive packaging.
- Keep connectors protected.
- Store in a clean, dry environment.
- Avoid unnecessary handling of components.
- Keep the original identification label visible.
- Record the complete part number and revision in inventory.
For semiconductor equipment spares, photographing the PCB identification before storage is also useful when multiple revisions exist.
Frequently Asked Questions
Q: What is LAM Research 853-049542-173?
A: It is a Lam Research 24-channel temperature controller node PCB/assembly used in semiconductor processing equipment.
Q: Is 810-028295-173 related to this board?
A: Yes. Multiple listings identify 810-028295-173 alongside 853-049542-173.
Q: How many temperature channels does it control?
A: Available product records identify the assembly as a 24-channel temperature controller.
Q: Is this a standalone temperature controller?
A: No. It is a node PCB intended to operate as part of a Lam Research semiconductor equipment control architecture.
Q: Can another 24-channel temperature board replace it?
A: Not automatically. The part number, revision, connectors, system software, calibration, and equipment configuration should all be verified.
Q: What should I check before purchasing a replacement?
A: Match the complete 853-049542-173 identification, PCB revision, connector layout, associated part number, and the equipment/tool configuration.
Related Part References
The following references are associated with this product family:
- 853-049542-173 — Primary part number
- 810-028295-173 — Associated part number appearing on multiple listings
- Lam Research 24 CH TEMP CTLR assembly
- Lam Research Node PCB
These references should be treated as related identification numbers rather than automatically interchangeable replacements.
Identification and Ordering Notes
For replacement or inventory purposes, record:
Brand: LAM Research
Part Number: 853-049542-173
Associated P/N: 810-028295-173
Function: 24-Channel Temperature Controller Node PCB
The exact board revision and physical connector configuration should be checked against the customer’s existing unit before installation.
Suggested eBay Title
LAM RESEARCH 853-049542-173 | 24-Channel Temperature Controller PCB
