Description
⚙️ Product Overview
The MKS 649A13T53C3VR is an electronic pressure controller with an integrated mass flow meter for semiconductor and high-purity gas applications. Based on the Type 649A ordering code, this configuration is designed for a 1000 Torr full-scale pressure range and 5000 SCCM full-scale N2-equivalent flow measurement.
The model code also identifies a #3 valve orifice, corresponding to the 5000 SCCM flow range, together with a Viton valve plug and Swagelok 4 VCR male fittings. The controller combines pressure measurement, pressure control, flow monitoring, and proportional valve control in one equipment package.
🔹 Brand: MKS
🔹 Model: 649A13T53C3VR
🔹 Series: Type 649A
🔹 Product Type: Electronic Pressure Controller with Mass Flow Meter
🔹 Gas Reference: N2 Equivalent
🔹 Full-Scale Flow: 5000 SCCM
🔧 Key Features
🔹 Integrated electronic pressure controller
🔹 Built-in mass flow meter
🔹 1000 Torr full-scale pressure configuration
🔹 5000 SCCM full-scale N2-equivalent flow range
🔹 #3 valve orifice for the 5000 SCCM range
🔹 Viton valve plug material
🔹 Swagelok 4 VCR male fittings
🔹 Suitable for semiconductor and high-purity gas systems
🔹 Combines pressure measurement and flow monitoring
🔹 Compact integration for process gas control applications
📋 Product Datasheet
| Parameter | Specification |
|---|---|
| Brand | MKS |
| Model | 649A13T53C3VR |
| Series | Type 649A |
| Product Name | Electronic Pressure Controller with Mass Flow Meter |
| Product Type | Pressure Controller |
| Pressure Range | 1000 Torr Full Scale |
| Pressure Range Code | 13T |
| Gas Reference | Nitrogen / N2 Equivalent |
| Full-Scale Flow Rate | 5000 SCCM |
| Flow Rate Code | 53C |
| Valve Orifice | #3 |
| Orifice Capacity | 5000 SCCM Nominal Full Scale |
| Valve Plug Material | Viton |
| Fitting Type | Swagelok 4 VCR Male |
| Fitting Code | R |
| Main Function | Pressure Control and Flow Monitoring |
| Sensor Integration | Integrated Mass Flow Meter |
| Application | Semiconductor / High-Purity Gas Systems |
| Electrical Configuration | Verify Actual Unit |
| Communication Interface | Verify Actual Unit |
| Dimensions | Verify Actual Unit |
| Weight | Verify Actual Unit |
| Country of Origin | Verify Actual Unit |
| Condition | New Open Box / Verify Actual Unit |
The 649A ordering information confirms that code 13T corresponds to a 1000 Torr full-scale pressure range, 53C corresponds to 5000 SCCM N2-equivalent flow, 3 identifies the 5000 SCCM valve orifice, V identifies Viton, and R identifies Swagelok 4 VCR male fittings.
⚡ Operating Function
The MKS 649A combines several process-control functions into one assembly.
A simplified process arrangement is:
Process Gas Supply → 649A Pressure Controller → Controlled Process Chamber / Gas System
The integrated pressure-control system measures process pressure and adjusts the control valve to maintain the required pressure condition. At the same time, the integrated mass flow meter monitors gas flow through the controller.
The 5000 SCCM configuration is referenced as an N2-equivalent full-scale flow range. Actual flow behavior can vary when gases other than nitrogen are used, depending on gas properties and the applicable system configuration.
The Type 649A product family is designed for applications where pressure control and flow information are both required in the same process system.
🧰 Installation & Configuration
🔹 Verify the Complete Model Number
Before installation, confirm:
- MKS 649A13T53C3VR
- 1000 Torr pressure configuration
- 5000 SCCM flow configuration
- #3 valve orifice
- Viton valve plug
- 4 VCR fitting configuration
- Connector arrangement
- Electrical interface
- Equipment compatibility
The complete ordering code should be matched because different Type 649A configurations can have different pressure ranges, flow ranges, valve orifices, and sealing materials.
🔹 Inspect the Gas Connections
Before connecting the controller:
- Inspect the VCR fittings.
- Check sealing surfaces.
- Confirm compatible tubing and fittings.
- Inspect for contamination.
- Verify the gas flow direction.
- Follow the equipment’s approved leak-check procedure.
High-purity gas systems should be kept clean during installation to avoid contamination of the flow-measurement and valve components.
🔹 Check the Process Configuration
Confirm the application requirements for:
- Pressure range
- Gas type
- Flow range
- Inlet pressure
- Differential pressure
- Control direction
- Valve configuration
- Electrical control signals
Do not install the controller based only on physical fitting compatibility.
🔹 Controlled Startup
After installation:
- Verify all gas connections.
- Perform the required leak inspection.
- Confirm electrical connections.
- Apply power according to the equipment procedure.
- Allow the controller to initialize.
- Check the pressure reading.
- Verify flow measurement.
- Test the pressure-control response.
- Confirm stable operation before production use.
🔩 Maintenance Recommendations
🧹 Keep the Gas Path Clean
Contamination can affect pressure measurement, flow measurement, and valve performance.
Use clean installation procedures and avoid introducing particles or unsuitable materials into the gas path.
🔧 Inspect the Fittings
Periodically check the VCR connections for:
- Mechanical damage
- Improper tightening
- Contamination
- Seal damage
- Evidence of leakage
⚙️ Monitor Control Stability
If the system develops unstable pressure control, investigate:
- Gas supply conditions
- Process pressure
- Differential pressure
- External leaks
- Restriction in the gas line
- Valve performance
- Controller configuration
🧾 Maintain Configuration Records
For spare-part management, record:
- Complete model number
- Installed equipment
- Gas type
- Pressure range
- Flow range
- Electrical interface
- Serial number
- Calibration status
- Installation date
❓ Frequently Asked Questions
Q: What is the MKS 649A13T53C3VR?
A: It is an MKS Type 649A electronic pressure controller with an integrated mass flow meter.
Q: What is the pressure range?
A: The 13T model code identifies a 1000 Torr full-scale pressure range.
Q: What does 53C mean?
A: The 53C code identifies a 5000 SCCM full-scale flow rate based on N2 equivalent.
Q: What does the number 3 represent in the model?
A: It identifies the #3 valve orifice, which is associated with the nominal 5000 SCCM full-scale flow range.
Q: What sealing material is used?
A: The V code identifies a Viton valve plug configuration.
Q: What type of fittings does it use?
A: The R code identifies Swagelok 4 VCR male fittings.
Q: Is this a mass flow controller?
A: The Type 649A is primarily an electronic pressure controller with an integrated mass flow meter. It combines pressure-control functionality with flow monitoring rather than functioning as a conventional standalone mass flow controller.
Q: Can another 649A model directly replace this unit?
A: Not automatically. The pressure range, flow range, valve orifice, sealing material, fitting configuration, and electrical interface should all match the original unit.
Q: What should be checked before purchasing a replacement?
A: Confirm the complete model number, gas application, pressure range, 5000 SCCM flow range, valve configuration, fittings, electrical connector, and actual physical condition.
🔄 Recommended Related MKS Models
- MKS 649A13T53C3VR — Pressure Controller with Mass Flow Meter
- MKS 649A11T11CA — 10 Torr Pressure Controller
- MKS 649A21T21C1 — 20 Torr Pressure Controller
- MKS 649A51T51C1 — 50 Torr Pressure Controller
- MKS 649A12T12C1 — 100 Torr Pressure Controller
- MKS 649A13T13C2 — 1000 Torr Pressure Controller
- MKS PPCMA — Integrated Pressure Controller with Mass Flow Meter
- MKS PPCA — High Performance Pressure Control Valve
- MKS GE50A — Multi-Gas Mass Flow Controller
- MKS GV50A — Mass Flow Controller with Shut-Off Valve
The related models above belong to MKS pressure-control and gas-flow-control product families. They should not be treated as direct replacements without matching the full process, pressure, flow, gas, fitting, and electrical requirements.
🏭 Application Summary
The MKS 649A13T53C3VR is a specialized electronic pressure controller with integrated mass flow measurement for controlled gas-processing applications.
Its model configuration identifies a 1000 Torr full-scale pressure range, 5000 SCCM N2-equivalent flow range, #3 valve orifice, Viton valve plug, and 4 VCR male fitting configuration. These specifications make accurate model-number verification especially important when sourcing a replacement.
Product Identification: MKS 649A13T53C3VR
Product Type: Electronic Pressure Controller with Mass Flow Meter
Pressure Range: 1000 Torr Full Scale
Flow Range: 5000 SCCM N2 Equivalent
Valve Orifice: #3
Valve Plug: Viton
Application: Semiconductor and High-Purity Gas Systems
