Description
The PFEIFFER EVR116 is a motorized gas control valve designed for controlled gas flow and pressure regulation in vacuum systems. It features an integrated motor control system and a wide controllable flow range. Pfeiffer identifies the EVR 116 as a DN 16 ISO-KF gas control valve controlled by an RVC 300 or IF 200 controller.
The valve is suitable for applications where stable pressure regulation and controlled gas admission are required. It can be used as part of a vacuum control loop together with a pressure controller and suitable pressure measurement equipment.
🔧 Main Function
The EVR116 regulates gas flow by motor-driven valve positioning. The valve position can be controlled according to the pressure or flow-control requirements of the connected vacuum system.
The valve is also used with the Pfeiffer RVC 300 controller. In this configuration, the controller can automatically recognize the EVR116 and use it as the active control valve.
🏭 Typical Applications
• Vacuum process equipment
• Mass spectrometry systems
• Gas analysis systems
• Semiconductor and laboratory vacuum equipment
• Industrial vacuum chambers
• Process gas control
• Vacuum pressure regulation
• Pfeiffer Vacuum systems
📋 Product Datasheet
| Parameter | Specification |
|---|---|
| Manufacturer | PFEIFFER VACUUM |
| Model | EVR116 |
| Part Number | PF I39 931 A |
| Product Type | Motorized Gas Control Valve |
| Main Flange | DN 16 ISO-KF |
| Actuator | Motorized |
| Control Unit | RVC 300 / IF 200 |
| Control Voltage | 0–10 V DC |
| Input Voltage | 24 V DC |
| Maximum Power Consumption | 12 W |
| Maximum Controllable Gas Flow | 1.25 × 10³ hPa·l/s |
| Minimum Controllable Gas Flow | 5 × 10⁻⁶ hPa·l/s |
| Minimum Operating Pressure | 1 × 10⁻⁸ hPa |
| Maximum Absolute Pressure | 2500 hPa |
| Leak Rate | 1 × 10⁻¹⁰ Pa·m³/s |
| Opening Time | Approx. 4 s |
| Closing Time | Approx. 3 s |
| Weight | Approx. 0.75 kg |
| Ambient Temperature | 5–40 °C |
| Bakeout Temperature | Actuator 60 °C / Housing 80 °C |
| Housing Material | Stainless Steel |
The values above are based primarily on Pfeiffer’s published product information for the EVR 116.
⚡ Key Features
• Motorized gas-flow regulation
• Wide controllable flow range
• Integrated motor-control electronics
• DN 16 ISO-KF vacuum connection
• 24 VDC operation
• 0–10 VDC control input
• Compatible with RVC 300 and IF 200 controllers
• Stainless-steel construction
• Suitable for high-throughput vacuum applications
🔌 Control & Integration
The EVR116 can be integrated with a Pfeiffer RVC 300 pressure controller. In a typical pressure-control configuration, the controller receives pressure information from the vacuum measurement system and adjusts the EVR116 valve position to regulate the process pressure. Pfeiffer documentation shows EVR116 used with RVC 300 in regulated sampling and vacuum-analysis systems.
🛠️ Installation Notes
Before installation, verify the complete valve identification, DN 16 ISO-KF connection, control interface, 24 VDC supply, and compatibility with the selected controller.
Make sure the vacuum connection is clean and correctly sealed. Check the valve’s orientation and ensure that the gas path is free from contamination that could affect valve movement or sealing performance.
⚙️ Commissioning Checklist
• Verify EVR116 model and part number
• Check DN 16 ISO-KF connection
• Confirm 24 VDC supply
• Verify 0–10 VDC control signal
• Check controller compatibility
• Inspect vacuum seals
• Test valve opening and closing
• Verify pressure response
• Check maximum/minimum operating pressure
• Confirm stable pressure regulation
⚠️ Compatibility Notice
The PFEIFFER EVR116 is a motorized vacuum gas control valve, not a PLC or electronic I/O module. Correct operation depends on the compatible controller, vacuum sensor, process pressure, gas type, and system configuration.
For replacement applications, verify the exact part number and flange configuration before installation.
📦 Product Identification
Brand: PFEIFFER VACUUM
Model: EVR116
Part Number: PF I39 931 A
Product Type: Motorized Gas Control Valve
Connection: DN 16 ISO-KF
Control: 0–10 VDC / RVC 300 / IF 200
Supply: 24 VDC
Application: Vacuum Pressure & Gas Flow Control



