Description
Product Overview
The TEL Tokyo Electron TEB162PA 3M81-026766-13 is an MC Controller assembly associated with TEL semiconductor etching equipment. Available TEL equipment-parts references identify it specifically as a TEB162PA Etcher MC Controller, and another listing describes the assembly with TEB203-12/GST and TEB204-21/ADP cards.
As a machine-control assembly, the controller is part of the equipment’s electronic control architecture and can interface with associated control or subsystem boards. The exact I/O assignment and control functions depend on the TEB162PA configuration and the equipment revision.
Key Features
- Manufacturer: TEL / Tokyo Electron
- Part Number: 3M81-026766-13
- Assembly: TEB162PA
- Product Type: Etcher MC Controller
- Application: Semiconductor plasma etching equipment
- Controller assembly for equipment-level machine control
- Associated cards may include TEB203-12/GST and TEB204-21/ADP
- Suitable for equipment maintenance and spare-parts inventory
- Exact system compatibility should be verified before installation
Technical Datasheet
| Parameter | Specification |
|---|---|
| Manufacturer | TEL Tokyo Electron |
| Part Number | 3M81-026766-13 |
| Model / Assembly | TEB162PA |
| Product Description | Etcher MC Controller |
| Product Type | Machine Controller Assembly |
| Application | Semiconductor etching equipment |
| Associated Boards | TEB203-12/GST, TEB204-21/ADP |
| Equipment Category | Etch / semiconductor processing |
| Installation | Equipment-specific |
| Configuration | System and revision dependent |
| Compatibility | Verify complete assembly and revision |
Publicly available references confirm the part number and TEB162PA controller designation, but they do not provide a reliable OEM datasheet covering the controller’s exact CPU architecture, operating voltage, I/O count, communication interfaces, connector pinout, or firmware version. These details should not be assumed without checking the physical unit or TEL equipment documentation.
Controller Function
The MC Controller serves as part of the electronic control system of the etcher. In this type of semiconductor equipment, the machine controller typically participates in coordinating equipment subsystems and exchanging status or control information with associated boards.
The actual control structure can vary by equipment configuration. For this reason, the controller should be evaluated as an equipment-specific assembly rather than treated as a general-purpose PLC or standalone industrial computer.
The available parts reference is particularly useful because it associates 3M81-026766-13 with the TEB162PA and separately identifies a configuration containing TEB203-12/GST and TEB204-21/ADP cards.
Typical Applications
This controller is relevant to maintenance and spare-parts requirements for TEL semiconductor etching equipment.
Typical use cases include:
- Replacement of a failed MC controller
- Troubleshooting equipment control faults
- Semiconductor etch-tool maintenance
- Controller assembly replacement
- Equipment refurbishment
- Production-line spare inventory
- Backup parts for legacy TEL equipment
- System-level troubleshooting and repair
TEL equipment-parts references also list TEB162PA as an etcher controller assembly, confirming its association with semiconductor processing equipment.
Installation & Configuration
Before replacing an existing controller, record the identification information from the original assembly:
- Confirm the complete part number.
- Check the assembly/model designation.
- Record any revision markings.
- Photograph connector locations and cable routing.
- Check the identification of installed daughterboards or associated cards.
- Compare the replacement with the existing controller before installation.
Disconnect equipment power according to the applicable TEL service procedure. Handle the controller using appropriate ESD precautions, especially when working with exposed PCB assemblies.
After installation, verify connector seating, mounting hardware, board configuration and system status before returning the equipment to production.
Maintenance & Inspection
For a used controller assembly, inspect:
- PCB surfaces for contamination or corrosion
- Connectors for bent or damaged contacts
- PCB mounting points
- Components showing signs of overheating
- Loose hardware or shielding
- Cable connectors and locking mechanisms
- Board revision and identification labels
- Evidence of previous repair or modification
For semiconductor equipment, contamination control is important. Avoid applying solvents or cleaning methods unless they are known to be suitable for the specific PCB materials and components.
A functional test should be performed using the appropriate TEL equipment service procedure whenever test capability is available.
Replacement & Compatibility Notes
The complete part number 3M81-026766-13 should be used as the primary identification reference.
Do not substitute another TEL controller solely because it has a similar TEB-series designation. TEL equipment uses many application-specific controller and interface assemblies, and similar-looking boards may have different firmware, I/O assignments, connectors or system functions.
Before ordering a replacement, compare:
- Complete part number
- TEB162PA designation
- Revision markings
- Board/card configuration
- Connector arrangement
- Associated TEB203-12/GST card
- Associated TEB204-21/ADP card
- Target etcher configuration
- Existing equipment documentation
The reference to TEB203-12/GST and TEB204-21/ADP is especially useful when checking whether a complete assembly matches the original configuration.
Identification
Manufacturer: TEL Tokyo Electron
Model: TEB162PA
Part Number: 3M81-026766-13
Description: Etcher MC Controller
Available equipment-parts records list the exact combination TEB162PA / 3M81-026766-13 as a TEL Tokyo Electron Etcher MC Controller.
Recommended eBay SEO Title
TEL Tokyo Electron TEB162PA 3M81-026766-13 Etcher MC Controller
Short Chinese Title
TEL TEB162PA 3M81-026766-13 | 蚀刻机主控制器
