⚡ KLA-Tencor | 2114B-30SLT Power Supply
📦 Product Overview
The KLA-Tencor 2114B-30SLT Power Supply is a high-precision 30mW argon laser power supply unit engineered for semiconductor metrology and wafer surface inspection systems. Originally manufactured by JDS Uniphase (JDSU) for KLA-Tencor tools, this power supply provides ultra-stable high-voltage output and current regulation required to drive air-cooled argon-ion laser heads. It is widely utilized across KLA-Tencor Surfscan series, AIT systems, and SP1 inspection platforms to maintain consistent laser emission, low optical noise, and reliable tool uptime.
📋 Product Specifications (Datasheet)
📌 Brand: KLA-Tencor (JDS Uniphase / JDSU OEM)
📌 Model: 2114B-30SLT (Part Number: 168807 / 0603619-000)
📌 Series: Surfscan / AIT / SP1 Semiconductor Inspection Series
📌 Product Name: 30mW Argon Laser Power Supply
📌 Place of Manufacture: United States
📌 Product Status: Refurbished / Spare Part Support Available
📌 Dimensions: Approx. 310 mm x 210 mm x 110 mm
📌 Weight: Approx. 3.5 kg
📌 Power Rating: 100–240V AC Input / 30mW Argon Laser Drive Output
📌 Discontinuation Status: Discontinued by OEM (Legacy equipment part)
🔧 Parameter Configuration & Modification Methods
⚙️ Hardware Voltage & Current Calibration: The power supply features internal precision potentiometers designed for optical service technicians to calibrate laser tube current and adjust light-loop gain according to tube wear and target output power.
⚙️ System Interface Configuration: Control lines, remote interlock loop parameters, and status signals are communicated directly through the multi-pin DB control connector attached to the system’s controller rack.
🔄 Manual & Automatic Mode Switching
⚙️ Automatic Mode: In standard wafer inspection operation, the host tool controller automatically manages laser power-up timing, laser tube ignition, active light-loop regulation, and standby power states via system control signals.
⚙️ Manual / Service Mode: During maintenance or optics alignment, service engineers can manually initiate laser striking, override standard light-loop settings via external optical power meters, and perform tube output tests using diagnostic interface tools.
❓ Frequently Asked Questions (Q&A)
❓ Q1: Which KLA-Tencor tools are compatible with the 2114B-30SLT power supply?💡 A1: It is primarily used in KLA-Tencor Surfscan 6200, 6220, 6400, and 6420 systems, as well as AIT I, SP1 Classic, and SP1 TBI wafer inspection systems.
❓ Q2: How can I tell if an issue is caused by the power supply or the laser head?💡 A2: Failure to strike the laser tube or sudden shutdown during ignition typically points to a power supply or interlock fault, whereas a laser that ignites but fails to achieve output power usually indicates an aging laser head.
❓ Q3: Is calibration required after replacing the power supply?💡 A3: Yes, verifying the laser tube current, output beam stability, and baseline signal alignment within the tool diagnostic software is recommended after unit replacement.
⭐ Recommended KLA-Tencor Models
⭐ 2214-30SLQTC (30mW Argon Laser Head)
⭐ 2113-75SLT (75mW Laser Power Supply)
⭐ 2213-75SLRAM (75mW Argon Laser Assembly)
⭐ 2214-30SLQRT (30mW Laser Assembly without rings)
⭐ Surfscan 6200 (Wafer Surface Inspection System)
⭐ Surfscan 6420 (Unpatterned Surface Inspection Tool)
⭐ AIT I (Automated Inspection System)
⭐ SP1 Classic (Unpatterned Wafer Inspection Platform)
⭐ 0105128-000 (Laser System Control Assembly)
⭐ 0278424-000 (Laser System Power Module)
