The ZYGO ZMI-2002 (Zygo Measurement Interface) is a high-precision, dual-axis displacement measurement board designed by ZYGO Corporation. Built on a standard 6U VMEbus form factor, the ZMI-2002 interfaces directly with ZYGO heterodyne laser interferometers to deliver sub-nanometer displacement data in real time for semiconductor lithography, precision stage metrology, and high-accuracy coordinate measuring systems.
Technical Specifications
| Parameter | Specification |
| Manufacturer | ZYGO Corporation |
| Product Series | ZMI (Zygo Measurement Interface) Series |
| Model / Part Number | ZMI-2002 (ZMI 2002) |
| Board Type | Dual-Axis Heterodyne Laser Interferometer VME Card |
| Form Factor | 6U VMEbus (Standard 160 mm × 233.35 mm Eurocard) |
| Number of Axes | 2 Independent Measurement Axes per Board |
| Measurement Resolution | Sub-nanometer (\lambda/1024 to \lambda/4096 depending on optical setup) |
| Maximum Velocity | Up to 2.0 m/s (dependent on laser beat frequency) |
| Sampling Rate | Up to 20 MHz real-time position updating |
| Bus Interface | VMEbus (A24/A32 address, D16/D32 data transfer) |
| Optical Signal Inputs | Fiber-optic inputs / BNC reference and measurement signals |
Core Features & System Capabilities
- Dual-Axis High-Speed Tracking: Simultaneously processes two optical measurement channels, making it ideal for tracking X–Y stages or measuring linear position alongside pitch/yaw angular motion.
- Sub-Nanometer Resolution: Decodes optical interference phase shifts using high-frequency digital signal processing to yield sub-nanometer position resolution at high velocities.
- VMEbus Real-Time Integration: Interfaces smoothly with VME real-time operating systems (such as VxWorks or RTOS controllers) to provide low-latency position feedback to high-speed motion controllers.
- VME / Dedicated Auxiliary Output: Features high-speed parallel / 32-bit digital output ports for direct, low-latency position streaming directly to stage controller DSPs, bypassing VMEbus polling delays.
- Environmental & Fiber Receiver Integration: Compatible with ZYGO fiber-optic receiver modules, environmental compensation units (ZMI 2000 / 4000 series), and automated phase correction hardware.
Related ZYGO ZMI Interferometry Components
- ZMI-2000 / ZMI-4000 — Multi-Axis ZYGO Measurement Interface Chassis Platforms.
- ZYGO ZMI 7702 / 7714 — Stabilized Helium-Neon (HeNe) Laser Heads (632.8 nm).
- ZMI Optical Receivers — Fiber-optic pickup heads for heterodyne beam alignment.
- ZMI Environmental Compensation Unit — Real-time wavelength compensation for air temperature, pressure, and humidity changes.
